Effect of stators geometry on the resonance sensitivity of capacitive MEMS
نویسندگان
چکیده
The work investigates alternative capacitive sensing topologies for microelectromechanical systems, that simultaneously enable large quasi-stationary sensitivity, comparable to parallel-plates configuration, and large quality (Q) factor. In agreement with the model predictions, about 3-fold larger Q factor and 2-fold larger resonant sensitivity are obtained on the optimized geometry. © 2015 The Authors. Published by Elsevier Ltd. Peer-review under responsibility of the organizing committee of EUROSENSORS 2015.
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تاریخ انتشار 2015